Direct writing of Cu-based fine micropatterns using femtosecond laser pulse-induced sintering of Cu2O nanospheres
Direct writing of Cu-based fine micropatterns using femtosecond laser pulse-induced sintering of Cu2O nanospheres
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DOI：
10.7567/1347-4065/ab0545
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发表时间：
2019-06-01
影响因子：
1.5
通讯作者：
Kondo, Yukinari
中科院分区：
文献类型：
--
作者：
Mizoshiri, Mizue;Kondo, Yukinari
利用飞秒激光脉冲诱导烧结Cu 2 O纳米球直接制备了铜基微图案。将多元醇法合成的Cu 2 O纳米球旋涂在玻璃基底上。通过Z扫描法对Cu 2 O纳米球薄膜的非线性光学吸收进行了研究，得到了Cu 2 O纳米球薄膜的双光子吸收系数约为70 cm GW（-1），这与块状Cu 2 O的双光子吸收系数相当。虽然在100-1000 μ m·s（-1）的高扫描速度下获得Cu和Cu 2 O复合微图案，但在1 μ m·s（-1）的低扫描速度下形成CuO微图案。与利用线性光吸收的CuO纳米颗粒的飞秒激光烧结相比，使用Cu 2 O纳米球获得的线图案的宽度在每个脉冲能量下较小。这些结果表明，双光子吸收引起的吸收面积的减少，提供了小的线宽。这种直接写入技术是有用的选择性制造的铜基精细微图案。(c)2019日本应用物理学会
Cu-based micropatterns were directly fabricated using femtosecond laser pulse-induced sintering of Cu2O nanospheres. Cu2O nanospheres synthesized by the polyol method were spin-coated on glass substrates. By evaluating the nonlinear optical absorption of the Cu2O nanosphere films using the Z-scan method, the two-photon absorption coefficient was estimated as similar to 70 cm GW(-1), which is adequate in comparison with that of bulk Cu2O. Although Cu and Cu2O composite micropatterns were obtained at a high scan speed of 100-1000 mu m s(-1), CuO micropatterns were formed at a low scan speed of 1 mu m s(-1). Compared with the femtosecond laser sintering of CuO nanoparticles using linear optical absorption, the width of line patterns obtained using Cu2O nanospheres was smaller at each pulse energy. These results suggest that two-photon absorption induced a decrease of the absorbed area, providing the small line width. This direct writing technique is useful for selective fabrication of Cu-based fine micropatterns. (c) 2019 The Japan Society of Applied Physics