Biocompatible coatings for CMUTs in a harsh, aqueous environment
Biocompatible coatings for CMUTs in a harsh, aqueous environment
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DOI：
10.1088/0960-1317/17/5/020
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发表时间：
2007-05-01
影响因子：
2.3
通讯作者：
Pruitt, B. L.
中科院分区：
文献类型：
--
作者：
Zhuang, X.;Nikoozadeh, A.;Pruitt, B. L.
报道了用两种不同的生物相容性材料聚对二甲苯-c和聚二甲基硅氧烷（PDMS）涂覆电容式微机械超声换能器（CMUT）阵列的结果。这些材料的特征在于与CMUT一起使用，以实现直接接触经皮和体内成像。需要钝化涂层来为器件的有源区域提供电绝缘，并保护其免受腐蚀性环境的影响。它还必须提供良好的机械特性以避免成像伪影。将涂层器械与无涂层器械并排比较，以进行空气中的试验。对谐振频率、崩溃电压和串扰进行了采样。还使用脉冲激励在水下测试了聚对二甲苯涂覆的CMUT。聚对二甲苯涂层为水溶液提供电绝缘14天。这两种涂层都显示出器件谐振频率的降低和崩溃电压的增加，正如所提出的理论所预期的那样。
The results of coating capacitive micromachined ultrasonic transducer (CMUT) arrays with two different biocompatible materials, parylene-c and polydimethylsiloxane (PDMS), are reported. These materials were characterized for use with CMUTs to enable direct contact transcutaneous and in vivo imaging. A passivation coating is required to provide electrical isolation to the active areas of the device and to protect it from a corrosive environment. It must also provide good mechanical characteristics to void imaging artifacts. The coated devices were compared side by side with uncoated devices for testing in air. The resonant frequency, collapse voltage and crosstalk were sampled. Parylene coated CMUTs were also tested underwater using pulse excitation. The parylene coating provided electrical insulation to the aqueous solution for 14 days. Both coatings showed a decrease in device resonant frequency and an increase in collapse voltage, as expected from the proposed theory.