High-accuracy range-sensing system based on FMCW using low-cost VCSEL
High-accuracy range-sensing system based on FMCW using low-cost VCSEL
复制标题
DOI：
10.1364/oe.26.009285
复制
发表时间：
2018-04-02
期刊：
影响因子：
3.8
通讯作者：
Wu, Ming C.
中科院分区：
文献类型：
--
作者：
Hariyama, Tatsuo;Sandborn, Phillip A. M.;Wu, Ming C.
涡轮机、压缩机和火车等大型零件的精密制造需要高精度的长距离形状测量。研制了一种基于调频连续波（FMCW）技术的高精度测距系统。我们的系统有两个独特的特点。首先，它通过以高扫描速率直接调制低成本垂直腔面发射激光器（VCSEL）来实现高精度测距。光学频率扫描的非线性通过参考干涉仪的响应来补偿。第二，使用具有多个光纤布拉格光栅（FBG）结构的光纤进行距离校准。测距精度优于10 μ m，在2米的距离。通过将FMCW测距与检流计扫描器相结合，获得了10 μ m体积的三维（3D）成像。(c)根据OSA开放获取出版协议的条款，2018年美国光学学会
Long-range shape measurement with high accuracy is needed for precision manufacturing of large-scale parts such as turbines, compressors, and trains. We have developed a high-accuracy ranging system based on frequency-modulated continuous-wave (FMCW) technology. Our system has two unique features. First, it achieves high-accuracy range measurement by directly modulating a low-cost vertical-cavity surface-emitting laser (VCSEL) at high sweep rates. The nonlinearity of the optical frequency sweep is compensated for by resampling through a reference interferometer. Second, an optical fiber with multiple fiber Bragg grating (FBG) structures is used for distance calibration. Ranging accuracy better than 10 mu m is achieved at 2 m distance. Three-dimensional (3D) imaging of 10-cubic-meter volume has been obtained by combining the FMCW ranging with a galvanometer scanner. (c) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement