Analytical closed form model for static pull-in analysis in electrostatically actuated torsional micromirrors
Analytical closed form model for static pull-in analysis in electrostatically actuated torsional micromirrors
复制标题
静电驱动扭转微镜静态拉入分析的解析闭合模型
DOI：
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发表时间：
2013
期刊：
影响因子：
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通讯作者：
M. Ahmadian
中科院分区：
文献类型：
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作者：
H. Moeenfard;M. Ahmadian
本文的目的是建立一个分析框架来研究静电驱动扭转微镜的静态吸合和平衡行为。首先推导了静电扭转微镜的静态行为方程，并对其进行了归一化处理。利用微扰法，即直接展开法求出了反射镜的吸合角。与文献中的数值计算结果的比较表明，所提出的二阶微扰展开给出了非常精确的近似的拉入角的镜子。然后再次利用直接微扰展开法对静电扭转微镜的电压依赖行为进行了解析模拟。数值计算和实验结果进行了比较，并观察到良好的协议。
The objective of this work is to create an analytical framework to study the static pull-in and also equilibrium behavior in electrostatically actuated torsional micromirrors. First the equation governing the static behavior of electrostatic torsion micromirrors is derived and normalized. Perturbation method, the method of straight forward expansion is utilized to find the pull-in angle of the mirror. Comparison of the presented results with numerical ones available in the literature shows that the proposed second order perturbation expansion gives very precise approximations for the pull-in angle of the mirror. Then straightforward perturbation expansion method is used again to analytically simulate the voltage dependent behavior in electrostatic torsion micromirrors. The results are compared with numerical and experimental findings and excellent agreement is observed.