Resonant accelerometer with self-test
Resonant accelerometer with self-test
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DOI：
10.1016/s0924-4247(01)00558-1
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发表时间：
2001-08-01
影响因子：
4.6
通讯作者：
Seidel, H
中科院分区：
文献类型：
--
作者：
Aikele, M;Bauer, K;Seidel, H
提出了一种新型谐振加速度计，由耦合到地震质量的双夹紧梁组成。梁由植入的电阻器热激发，并通过压阻方式感测其振动。使地震质量偏转的加速度会导致谐振器内部产生特征应变，从而改变其谐振频率。我们研究了谐振梁的振荡特性。从理论上和实验上处理了高激励幅度下的非线性。此外，还表明可以消除电串扰和热串扰。谐振传感原理确保了准数字输出信号、高灵敏度和机械完整性测试。先进的汽车安全系统和线控应用要求所使用的传感器具有高可靠性。这里介绍的传感器允许持续自检，而无需对传感器元件进行任何建设性更改。我们开发的自测试概念也适用于其他具有谐振结构的传感器。 (C) 2001 Elsevier Science B.V. 保留所有权利。
A new resonant accelerometer is presented consisting of a doubly clamped beam coupled to a seismic mass. The beam is thermally excited by an implanted resistor and its vibration is sensed piezoresistively. An acceleration which deflects the seismic mass leads to characteristic strains inside the resonator, shifting its resonance frequency. We studied the oscillation characteristics of the resonant beam. The non-linearity at high excitation amplitudes is treated theoretically and experimentally. Further, it is shown that the electrical and thermal cross-talk can be eliminated. The resonant sensing principle ensures a quasi-digital output signal, high sensitivity and a mechanical integrity test. Advanced automotive safety systems and x-by wire applications require a high reliability of the employed sensors. The sensor presented here allows an on-going self-test without any constructive changes of the sensor element. The self-test concept, we developed also finds applications in other sensors with resonant structures. (C) 2001 Elsevier Science B.V. All rights reserved.