An Efficient Deadlock Prevention Policy for Noncyclic Scheduling of Multicluster Tools
An Efficient Deadlock Prevention Policy for Noncyclic Scheduling of Multicluster Tools
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DOI：
10.1109/tase.2017.2771751
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发表时间：
2018-10
影响因子：
5.6
通讯作者：
T. Nishi;Y. Watanabe;Masaru Sakai
中科院分区：
文献类型：
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作者：
T. Nishi;Y. Watanabe;Masaru Sakai
由于群集工具之间的相互作用的复杂性包括多个模块，例如处理模块，带有单个或双臂的转换模块，因此已获得了很多关注。在本文中相互关联的两个，三个或更多的群集工具，我们为双臂多簇工具的非循环调度提出了僵局预防政策。提议的僵局预防政策可有效地为具有单个或双路径流的两个或三个连接的多簇工具生成有效的时间表。将方法与最大允许的僵局预防政策进行了比较。预防策略，用于为从业人员提供多个群集工具的非循环调度。交换策略。本文提出的挑战是为我们提出的非群集工具提供无僵硬的时间表简单的僵局预防政策可以应用于一般的多簇工具的大规模定时培养皿（PN）模型，而无需列举虹吸管计算或混合整数编程的解决方案。具有双重ATH的多簇工具表明，所提出的方法的总吞吐量的大约10％比传统方法的方法更好在包括清洁操作（清洁操作）的暂时性期间的非环保计划的有效操作。
Scheduling of multicluster tools has received much attention due to its complexity of interaction among cluster tools. A cluster tool comprises several modules such as processing modules, a transfer module with a single or dual-armed handling robot, and loadlock modules. A multicluster tool comprises two, three, or more cluster tools that are interconnected with each other. In this paper, we propose a deadlock prevention policy for noncyclic scheduling of dual-armed multicluster tools. The proposed deadlock prevention policy is effective for generating an efficient schedule for two or three-connected multicluster tools with a single or a dual-path flow. This is proven by analyzing the strict minimal siphon of the Petri net model. The performance of the proposed method is compared with that of a maximal permissible deadlock prevention policy. The results demonstrate that the proposed method is computationally efficient for larger state spaces and more suitable than conventional deadlock prevention policies for generating effective schedules for noncyclic scheduling of multicluster tools. Note to Practitioners—Scheduling of multicluster tools has recently attracted attention in the growing semiconductor manufacturing industry. Most conventional studies on multicluster tools focus on cyclic scheduling to minimize cycle time with swap strategy. The challenge addressed by this paper is to derive a deadlock-free schedule for multicluster tools with noncyclic operations. We propose a simple deadlock prevention policy that can be applied to large-scale timed Petri net (PN) model of general multicluster tools without enumeration of siphon computations or solution of mixed integer programming. A timed PN model is developed for noncyclic operations of dual-armed multicluster tools with a dual ath. The computational results show that the approximately 10% of the total throughput of the proposed method is better than those of the conventional methods. It enables more efficient operations for noncyclic scheduling under transient periods including cleaning operations.