Micromachining and surface processing of the super-hard nano-polycrystalline diamond by three types of pulsed lasers
Micromachining and surface processing of the super-hard nano-polycrystalline diamond by three types of pulsed lasers
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DOI：
10.1007/s00339-009-5326-8
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发表时间：
2009-09-01
影响因子：
2.7
通讯作者：
Sumiya, Hitoshi
中科院分区：
文献类型：
--
作者：
Okuchi, Takuo;Ohfuji, Hiroaki;Sumiya, Hitoshi
采用激光微细加工技术对高温高压直接转化法制备的超硬纳米多晶金刚石(NPD)进行了加工。测试了三种类型的脉冲激光：纳秒近红外激光、纳秒近紫外线激光和飞秒近红外激光。后两者还应用于合成金刚石单晶，并与NPD的结果进行了比较。结果表明，纳秒近红外激光是对NPD进行粗加工的最有效手段，而紫外光和飞秒激光对NPD的精密加工效果令人满意。用扫描和透射电子显微镜、激光扫描显微镜和显微拉曼光谱对激光处理后的表面进行了分析。这些分析表明，这三种类型的激光发挥着不同和互补的作用，它们的组合是将最硬的钻石微加工成任何所需形状的最佳解决方案。
Laser beam micromachining was applied to super-hard nano-polycrystalline diamond (NPD) synthesized by the direct conversion of graphite at high pressure and high temperature. Three types of pulsed lasers were tested: nanosecond near-infrared, nanosecond near-ultraviolet, and femtosecond near-infrared lasers. The latter two were also applied for synthetic single crystal of diamond to compare the results with those of the NPD. It was demonstrated that the nanosecond near-infrared laser was the most efficient device for rough shaping of the NPD, while the ultraviolet and femtosecond lasers give satisfactory results for precise surface finishing of it. The properties of the laser-processed surfaces were analyzed by scanning and transmission electron microscopy, laser scanning microscopy, and micro Raman spectroscopy. These analyses demonstrated that the three types of lasers play different and complementary roles, and that their combination is the best suitable solution for micromachining of the hardest diamond into any desired shapes.