A review of micro-contact physics for microelectromechanical systems (MEMS) metal contact switches
A review of micro-contact physics for microelectromechanical systems (MEMS) metal contact switches
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DOI：
10.1088/0960-1317/23/10/103001
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发表时间：
2013-09
影响因子：
2.3
通讯作者：
Benjamin F Toler;R. Coutu;J. McBride
中科院分区：
文献类型：
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作者：
Benjamin F Toler;R. Coutu;J. McBride
在相关的微接触领域的创新突出，这些包括，设计，接触电阻建模，接触材料，性能和可靠性。对每个领域的基础理论和相关创新进行了探索。致动方法的简要比较，以显示为什么静电致动是最常用的射频微机电系统设计师。检查的重要特征的接触界面，如建模和材料的选择进行了讨论。对基于塑性、弹塑性和弹性变形的微接触阻力模型进行了综述。金属接触微动开关的建模主要围绕接触面积和表面粗糙度进行。表面粗糙度及其对接触面积的影响时，强调考虑微接触电阻建模。有限元模型和各种方法来描述表面粗糙度进行了比较。包括金、金合金、碳纳米管、复合金-碳纳米管、钌、氧化钌以及钨在内的不同接触材料已被证明可以增强接触性能和可靠性，并且对每种材料都有不同的权衡。最后，审查的物理和电气故障模式见证了研究人员的详细和检查。
Innovations in relevant micro-contact areas are highlighted, these include, design, contact resistance modeling, contact materials, performance and reliability. For each area the basic theory and relevant innovations are explored. A brief comparison of actuation methods is provided to show why electrostatic actuation is most commonly used by radio frequency microelectromechanical systems designers. An examination of the important characteristics of the contact interface such as modeling and material choice is discussed. Micro-contact resistance models based on plastic, elastic-plastic and elastic deformations are reviewed. Much of the modeling for metal contact micro-switches centers around contact area and surface roughness. Surface roughness and its effect on contact area is stressed when considering micro-contact resistance modeling. Finite element models and various approaches for describing surface roughness are compared. Different contact materials to include gold, gold alloys, carbon nanotubes, composite gold-carbon nanotubes, ruthenium, ruthenium oxide, as well as tungsten have been shown to enhance contact performance and reliability with distinct trade offs for each. Finally, a review of physical and electrical failure modes witnessed by researchers are detailed and examined.