Surface and coordinate measurements with nanomeasuring machines
Surface and coordinate measurements with nanomeasuring machines
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使用纳米测量机进行表面和坐标测量
DOI：
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发表时间：
2012
期刊：
影响因子：
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通讯作者：
E. Manske
中科院分区：
文献类型：
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作者：
T. Hausotte;F. Balzer;N. Vorbringer;E. Manske
纳米测量机 (NMM-1) 设计用于在 25 mm × 25 mm × 5 mm 的测量体积内进行表面和坐标测量。该机器配备了三个零差平面镜微型干涉仪，用于测量可移动角镜的位移。被测物体放置在角镜上，角镜由三轴驱动系统定位。根据安装的探头系统，可以执行各种测量任务。大多数使用的传感器是一维触觉或光学表面传感器或探头。近年来，三维特征和侧壁的测量变得越来越重要。对于这些更复杂的测量，需要具有两个或三个灵敏度方向的探头系统，因此被集成到 NMM-1 中。本文概述了 NMM-1 的操作和特性、其在表面和坐标测量中的用途、集成探针系统以及所开发的两个探测系统。
The nanomeasuring machine (NMM-1) was designed for surface and coordinate measurements within a measurement volume of 25 mm × 25 mm × 5 mm. The machine is equipped with three homodyne plane-mirror miniature interferometers for the measurement of the displacement of a movable corner mirror. The object being measured is placed on the corner mirror, which is positioned by a three-axis drive system. Various measurement tasks are possible depending on the probe system installed. Most of the sensors utilised are one-dimensional tactile or optical surface sensors or probes. In recent years, measurements of three-dimensional features and sidewalls are becoming more important. For these more complex measurements, probe systems with two or three directions of sensitivity are necessary and were therefore integrated into the NMM-1. The article gives an overview of the operation and properties of the NMM-1, its use for surface and coordinate measurements, of integrated probe systems and of two probing systems developed.