Evaluation of amorphous diamond-like carbon-nitrogen films as wear protective coatings on thin film media and thin film head sliders
Evaluation of amorphous diamond-like carbon-nitrogen films as wear protective coatings on thin film media and thin film head sliders
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DOI：
10.1109/20.560133
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发表时间：
1997-01-01
影响因子：
2.1
通讯作者：
Judy, JH
中科院分区：
文献类型：
--
作者：
Sivertsen, JM;Wang, G;Judy, JH
随着磁性数据存储行业努力实现超高记录密度，要求飞行高度小于1微英寸，磁头磁盘接口（HDI）的摩擦学是磁盘驱动器设计的一个限制因素。非晶类碳金刚石（DLC）薄膜已成为耐磨涂层的首选材料。各种非晶DLC型涂层已被开发出来。最早的DLC材料是直流磁控溅射的纯碳薄膜。最近的发展已经生产出C:H（氢化碳）和C:N（碳氮）薄膜，它们比纯C薄膜具有更大的耐磨性。我们的目的是描述和评估非晶C:N薄膜作为薄膜介质和薄膜滑块上的耐磨涂层的耐磨性。C:H和C:N薄膜都比直流磁控溅射纯碳薄膜具有优越性。结合特性、显微硬度、表面粗糙度特征和初始磨损损伤的物理性质对耐磨性能有显著影响。最近一份关于纳米压痕测量和耐磨性能的报告证实了薄C:N涂层的射频二极管和直流磁控管面向目标溅射（FTS）优于其他DLC薄膜。
As the magnetic data storage industry strives to achieve ultra-high recording densities requiring fly heights of lass than one microinch, the tribology of the head-disk interface (HDI) is a limiting factor in disk drive design. Amorphous diamond-like-carbon (DLC) films have been the materials of choice for wear-protective coatings. Various amorphous DLC type coatings have been developed. The earliest DLC material was DC magnetron sputtered pure carbon films. Recent developments have produced C:H (hydrogenated-carbon) and C:N (carbon-nitrogen) films with greater wear-resistance than pure C fillm. Our intent is to describe and evaluate the wear-resistance performance of amorphous C:N films as wear-protective overcoats on thin film media and thin film sliders. Both C:H and C:N films have demonstrated superiority over DC magnetron sputtered pure carbon films. The bond character, microhardness, surface roughness features, and the physical nature of initial wear damage influence wear-resistance performance significantly. A recent report of nano-indentor measurements and wear-resistance performance confirmed the superiority of RF diode and DC magnetron Facing Target Sputtering (FTS) of thin C:N coatings over other DLC films.