Viscous damping and spring force calculation of regularly perforated MEMS microstructures in the Stokes' approximation.
Viscous damping and spring force calculation of regularly perforated MEMS microstructures in the Stokes' approximation.
复制标题
采用 Stokes 近似计算规则穿孔 MEMS 微结构的粘性阻尼和弹簧力。
DOI：
10.1016/j.sna.2013.07.011
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发表时间：
2013
期刊：
影响因子：
--
通讯作者：
Miles,RonaldN
中科院分区：
文献类型：
--
作者：
Homentcovschi,Dorel;Murray,BruceT;Miles,RonaldN
由规则图案的穿孔组成的微结构装置有许多应用，并且这些应用中的许多应用利用流体阻尼。对于粘性阻尼的分析和在某些情况下计算弹簧力，可以通过假设周期性来利用规则的孔图案。在这里，开发了一个模型，以确定这些量的基础上的解决方案的斯托克斯方程的空气流。粘性阻尼与热机械噪声直接相关。因此，设计具有最小粘性阻尼的多孔微结构具有真实的实际意义。提出了一种计算周期穿孔微结构阻尼系数的方法。所得结果可用于减小挤压油膜阻尼。由于微机械装置具有有限的尺寸，穿孔微结构的周期性模型必须与一些框架（边缘）校正的计算相关联。还进行了边缘校正的分析。分析公式和数值模拟的结果与已发表的实测数据吻合得很好。
There are a number of applications for microstructure devices consisting of a regular pattern of perforations, and many of these utilize fluid damping. For the analysis of viscous damping and for calculating the spring force in some cases, it is possible to take advantage of the regular hole pattern by assuming periodicity. Here a model is developed to determine these quantities based on the solution of the Stokes’ equations for the air flow. Viscous damping is directly related to thermal–mechanical noise. As a result, the design of perforated microstructures with minimal viscous damping is of real practical importance. A method is developed to calculate the damping coefficient in microstructures with periodic perforations. The result can be used to minimize squeeze film damping. Since micromachined devices have finite dimensions, the periodic model for the perforated microstructure has to be associated with the calculation of some frame (edge) corrections. Analysis of the edge corrections has also been performed. Results from analytical formulas and numerical simulations match very well with published measured data.