Two computer-generated holograms for testing convex aspheric surface
Two computer-generated holograms for testing convex aspheric surface
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DOI：
10.1117/12.899739
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发表时间：
2011-06
期刊：
影响因子：
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通讯作者：
Xiao-miao Hong;Pei-ji Guo;Jian-feng Ren
中科院分区：
文献类型：
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作者：
Xiao-miao Hong;Pei-ji Guo;Jian-feng Ren
基于计算全息图的检测系统可以实现高精度的非球面测量，本文研究了一种检测凸非球面的新方法-双计算全息图法。该方法具有抗干扰能力强、不需要大的辅助面等优点。针对凸双曲面反射镜，在Zemax软件中设计并优化了检测系统，检测精度优于0.015λ，其它干扰光线均成像于半径为0.8mm的孔外。最后对系统误差进行了详细的分析，结果表明该系统能够保证非球面的检测精度。此外，该检测系统还可以对离轴非球面和自由曲面进行检测。
Testing system based on computer-generated holograms(CGHs) can achieve high accuracy of aspherical measurement, this paper studies a new method for testing convex aspheric surface-two CGHs. This method has an advantage in resisting interference and needing no huge assistance surfaces. For a convex hyperboloidal mirror, such a testing system has been designed and optimized in Zemax with the testing accuracy of prior to 0.015λ, and all of other disturbing rays image outside of aperture with a radius of 0.8mm. Finally, the system errors are analyzed in detail and the results show that this system can guarantee the testing accuracy of aspherics. In addition, this testing system can also measure off-axis aspherics and free-form surfaces.