Realization of efficient 3D tapered waveguide-to-fiber couplers on a nanophotonic circuit
Realization of efficient 3D tapered waveguide-to-fiber couplers on a nanophotonic circuit
复制标题
DOI：
10.1364/oe.468738
复制
发表时间：
2022-08-29
期刊：
影响因子：
3.8
通讯作者：
Hung, Chen-Lung
中科院分区：
文献类型：
--
作者：
Chang, Tzu-Han;Zhou, Xinchao;Hung, Chen-Lung
我们报告了基于标准光刻技术的高效耦合 3D 锥形波导到光纤耦合器 (TWC) 的实现。 3D TWC 设计能够实现高效的平裂光纤与氮化硅光子波导耦合，T 约为 95% 的偏振不敏感耦合效率、宽带宽和良好的失准容限。我们在功能性纳米光子电路上制造的 3D TWC 实现了接近 85% 的耦合效率。除了高效光子耦合中的应用之外，所演示的 3D 光刻技术还为模场整形和有效折射率工程提供了一种补充方法，可能对集成光子电路中的一般应用有用。 (C) 2022 Optica Publishing Group 根据 Optica 开放获取出版协议的条款
We report the realization of efficiently coupled 3D tapered waveguide-to-fiber couplers (TWCs) based on standard lithography techniques. The 3D TWC design is capable of achieving highly efficient flat-cleaved fiber to silicon nitride photonic waveguide coupling, with T approximate to 95 % polarization-insensitive coupling efficiency, wide bandwidth, and good misalignment tolerance. Our fabricated 3D TWCs on a functional nanophotonic circuit achieve T approximate to 85% coupling efficiency. Beyond applications in high-efficiency photon coupling, the demonstrated 3D lithography technique provides a complementary approach for mode field shaping and effective refractive index engineering, potentially useful for general applications in integrated photonic circuits. (C) 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement