Ultra-fast laser-based surface engineering of conductive thin films
Ultra-fast laser-based surface engineering of conductive thin films
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DOI：
10.1016/j.apsusc.2019.144911
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发表时间：
2020-04-15
影响因子：
6.7
通讯作者：
Petkovsek, Rok
中科院分区：
文献类型：
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作者：
Mur, Jaka;Petelin, Jaka;Petkovsek, Rok
现代电子学促进了对快速、高效和可靠的方法的需求，以直接基于激光在柔性衬底上对有利的薄膜材料进行表面工程。脉冲激光光源发展的最新进展只是逐渐提高了处理速度，因为这些速度受到现有扫描系统的限制。我们的目标是将高脉冲重复频率、高功率脉冲按需光纤激光器与超快谐振扫描器相结合，实现高通量表面工程。能够补偿谐振式扫描仪正弦运动的因素是激光器内在的脉冲按需能力，而不是简单的脉冲拾取解决方案。在全激光功率下的高时间分辨率被用于空间控制的表面纹理，允许在高达60 m/S的扫描速度和10µm激光光斑的扫描仪范围内允许最低3µm的定位精度。我们将该设备应用于用于触摸屏、位置传感器或电磁屏蔽的柔性基板上的ITO和金属薄膜的加工。成功地展示了有利层的表面修饰和图案化，同时保持了底层表面的完整性。为了加深对烧蚀过程的理解，我们采用了一个简单的激光烧蚀模型，并与实验数据进行了比较。对所得表面形貌进行了观察和分析。
Modern electronics facilitate the need for fast, efficient, and reliable methods for direct laser-based surface engineering of conducive thin film materials on flexible substrates. Recent advances in pulsed laser source development only incrementally increased the processing speeds, as those are limited by the available scanning systems. Our goal was to combine a high pulse repetition frequency high-power pulse-on-demand fiber laser source with an ultra-fast resonant scanner to achieve high throughput surface engineering. The enabling factor to compensate a resonant scanner's sinusoidal movement were the laser's intrinsic pulse-on-demand capabilities beyond simple pulse picking solutions.The high temporal resolution at full laser power was exploited for spatially controlled surface texturing, allowing a minimally 3 mu m positioning accuracy throughout the scanner's range at up to 60 m/s scan speed with a 10 mu m laser spot size. We applied the setup to processing of ITO and metallic films on flexible substrates for touchscreens, position sensors, or EM shielding. Surface modification and patterning of the conducive layer was successfully demonstrated while keeping the underlying surface intact. We employed a simple laser ablation model in comparison to the experimental data to improve the understanding of the ablation process. The resulting surface topography was observed and analysed.