On‐chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film
On‐chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film
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DOI：
10.1002/adfm.202300805
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发表时间：
2023-03
影响因子：
19
通讯作者：
Zilong Zhang;Wen Zhao;Guo Chen;M. Toda;S. Koizumi;Y. Koide;M. Liao
中科院分区：
文献类型：
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作者：
Zilong Zhang;Wen Zhao;Guo Chen;M. Toda;S. Koizumi;Y. Koide;M. Liao
可电集成、高灵敏度和高可靠性的磁传感器尚未在高温（500°C）下实现。在这项研究中，通过将单晶金刚石（SCD）与大磁致伸缩FeGa薄膜耦合，展示了一种集成的片上单晶金刚石（SCD）微机电系统（MEMS）磁换能器。FeGa薄膜是多功能的，可以驱动谐振器，自我感应外部磁场，并电读出谐振信号。片上SCD MEMS传感器在室温至500°C范围内具有3.2 Hz mT - 1的高灵敏度，在300°C范围内具有9.45 nT Hz - 1/2的低噪声水平。谐振频率的最小波动在室温下为1.9 × 10−6，在300℃时为2.3 × 10−6。随后实现了具有并联电读出的SCD MEMS谐振器阵列，从而为磁图像传感器的发展提供了基础。本研究有助于开发具有高性能和高热稳定性的高度集成的片上MEMS谐振器换能器。
Electrically integrable, high‐sensitivity, and high‐reliability magnetic sensors are not yet realized at high temperatures (500 °C). In this study, an integrated on‐chip single‐crystal diamond (SCD) micro‐electromechanical system (MEMS) magnetic transducer is demonstrated by coupling SCD with a large magnetostrictive FeGa film. The FeGa film is multifunctionalized to actuate the resonator, self‐sense the external magnetic field, and electrically readout the resonance signal. The on‐chip SCD MEMS transducer shows a high sensitivity of 3.2 Hz mT−1 from room temperature to 500 °C and a low noise level of 9.45 nT Hz−1/2 up to 300 °C. The minimum fluctuation of the resonance frequency is 1.9 × 10−6 at room temperature and 2.3 × 10−6 at 300 °C. An SCD MEMS resonator array with parallel electric readout is subsequently achieved, thus providing a basis for the development of magnetic image sensors. The present study facilitates the development of highly integrated on‐chip MEMS resonator transducers with high performance and high thermal stability.