Spectral interferometric microscope with tandem liquid-crystal Fabry-Perot interferometers for extension of the dynamic range in three-dimensional step-height measurement.
Spectral interferometric microscope with tandem liquid-crystal Fabry-Perot interferometers for extension of the dynamic range in three-dimensional step-height measurement.
复制标题
配备串联液晶法布里-珀罗干涉仪的光谱干涉显微镜，用于扩展三维步长测量的动态范围。
DOI：
10.1364/ao.42.000682
复制
发表时间：
2003
期刊：
影响因子：
1.9
通讯作者：
T. Yoshizawa
中科院分区：
文献类型：
--
作者：
D. Mehta;H. Hinosugi;S. Saito;M. Takeda;T. Kurokawa;Hideki Takahashi;M. Ando;M. Shishido;T. Yoshizawa
光谱干涉显微镜的最大可测量范围取决于其可调谐的光谱滤光片所传输的光的相干长度。为了实现大范围的台阶高度测量，我们研制了一种新型的可调谐光谱滤光片，它使用串联的液晶法布里-珀罗涉仪(LC-FPI)，可以同时获得高光谱分辨率和大调谐范围。条纹可见度测量结果表明，串联LC-FP I传输的光的相干长度是单个LC-FP I的2倍。利用这种新型可调谐光谱滤光片，我们研制了一种新型光谱干涉显微镜，用于测量不连续物体的三维形状。给出了用单个LC-FP I和串联LC-FP I测量1微米、99微米和100微米台阶的标准钢量块组合的台阶高度的实验结果。串联式LC-FP I实现了亚微米分辨率的大范围(1-100微米)测量，这是我们以前使用单一LC-FP I系统所不可能实现的。
The maximum measurable range of a spectral interference microscope depends on the coherence length of the light transmitted by its tunable spectral filter. To achieve a large range in step-height measurement we have developed a new tunable spectral filter that uses tandem liquid-crystal Fabry-Perot interferometers (LC-FPIs), which can simultaneously attain both a high spectral resolution and a large tuning range. Fringe visibility measurements were carried out, and it was found that the coherence length of the light transmitted through tandem LC-FPIs is two times larger than that transmitted through a single LC-FPI. Using this novel tunable spectral filter, we developed a new spectral interference microscope for the measurement of three-dimensional shapes of discontinuous objects. Experimental results of step-height measurements both with a single LC-FPI and with tandem LC-FPIs are presented for a combination of standard steel gauge block sets with 1-, 99-, and 100-microm steps. A large range (1-100 microm) of measurement with submicrometer resolution was achieved with tandem LC-FPIs that was not possible with our previous system in which a single LC-FPI was used.