Servo Scanning EDM for 3D Micro Structures
Servo Scanning EDM for 3D Micro Structures
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DOI：
10.1115/mnc2007-21262
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发表时间：
2007
期刊：
影响因子：
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通讯作者：
Yong Li;H. Tong;Jingdan Cui;Yang Wang
中科院分区：
文献类型：
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作者：
Yong Li;H. Tong;Jingdan Cui;Yang Wang
在3D微结构的放电加工（EDM）中，电极磨损严重，需要在过程中进行补偿。为了获得加工精度和效率的更好平衡，提出了一种用于3D微结构的伺服扫描电火花加工方法，其中通过控制放电间隙常数来实时补偿电极磨损。合理地认为，如果保持较好的放电间隙，伺服扫描电火花加工各层的加工深度是一致的。伺服扫描电火花加工策略包括Pro/Engineer(Pro/E)的模型设计、扫描路径的规划与仿真以及加工过程。通过在电极伺服控制下逐层扫描并监测放电间隙信号来加工3D微结构。 CAM、间隙伺服控制和实时电极磨损补偿集成到加工系统中。开展了伺服扫描电火花加工评价实验和3D微结构典型加工实验。加工结果表明伺服扫描电火花加工放电更加稳定。伺服扫描微电火花加工有利于提高 3D 微结构的加工精度和效率。版权所有 © 2007 by ASME
In electro discharge machining (EDM) for 3D micro structures, the electrode wear is serious and it needs to be compensated in process. To obtain a better balance of the machining accuracy and efficiency, a servo scanning EDM method is proposed for 3D micro structures, in which the electrode wear is compensated on real-time by controlling the discharge gap constant. It is supposed reasonably that the machining depth of each layer in servo scanning EDM is consistent if discharge gap is kept preferably. The servo scanning EDM strategies include the model design by Pro/Engineer (Pro/E), the plan and simulation of scanning path, and the machining process. The 3D micro structures are machined by scanning layer-by-layer under servo control of the electrode with monitoring discharge gap signal. The CAM, gap servo control, and real-time electrode wear compensating are integrated into the machining system. The evaluation experiments of servo scanning EDM and the typical machining experiments of 3D micro structures have been carried out. The machining results show that the electro discharge in the servo scanning EDM is more stable. Servo scanning micro EDM is propitious to improve machining accuracy and efficiency in 3D micro structures.Copyright © 2007 by ASME