Fluid jet polishing of optical surfaces
Fluid jet polishing of optical surfaces
复制标题
DOI：
10.1364/ao.37.006771
复制
发表时间：
1998-10-01
期刊：
影响因子：
1.9
通讯作者：
Frankena, HJ
中科院分区：
文献类型：
--
作者：
Fahnle, OW;van Brug, H;Frankena, HJ
我们提出了一种新的精加工工艺，能够对复杂形状的光学表面进行局部整形和抛光。流体喷射系统用于将压力小于 6 巴的预混合浆料引导至光学表面。我们使用包含水和 10% #800 SiC 磨料 (21.8 μ m) 的浆料，将 BK7 样品的表面粗糙度从 350 nm rms 降低至 25 nm rms，并改变抛光样品 BK7 的形状，保持其表面粗糙度为 1.6 nm rms，从而证明了所提出方法的成形和抛光可能性。 (C) 1998 年美国光学学会。
We present a new finishing process that is capable of locally shaping and polishing optical surfaces of complex shapes. A fluid jet system is used to guide a premixed slurry at pressures less than 6 bars to the optical surface. We used a slurry comprising water and 10% #800 SiC abrasives (21.8 mu m) to reduce the surface roughness of a BK7 sample from 350 to 25 nm rms and to vary the shape of a polished sample BK7, maintaining its surface roughness of 1.6 nm rms, thereby proving both the shaping and polishing possibilities of the presented method. (C) 1998 Optical Society of America.