Nanoantenna-based ultrafast thermoelectric long-wave infrared detectors
Nanoantenna-based ultrafast thermoelectric long-wave infrared detectors
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DOI：
10.1038/s41598-020-70062-6
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发表时间：
2020-08
影响因子：
4.6
通讯作者：
G. Szakmany;G. Bernstein;E. Kinzel;A. Orlov;W. Porod
中科院分区：
文献类型：
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作者：
G. Szakmany;G. Bernstein;E. Kinzel;A. Orlov;W. Porod
我们研究了产生电信号的悬浮热电耦合纳米天线（TECNAs）以上的准球形反射腔，以响应快速变化的长波红外辐射。这些传感器使用谐振纳米天线将IR能量耦合到纳米级热电偶。它们位于蚀刻到Si衬底中的腔体上方，该腔体提供热隔离，并被设计为光学元件以将IR辐射聚焦到天线。我们研究了这种TECNA对10.6 μm调幅红外信号的频率响应。我们实验证明，响应时间为3 μs的顺序，信号带宽约为300 kHz。所观察到的电响应与基于纳米结构的热性质的有限元方法模拟具有良好的相关性。实验和模拟都显示了这种结构的灵敏度和响应时间之间的关键权衡，并为特定的目标应用提供了解决方案。
We investigate the generation of electrical signals by suspended thermoelectrically coupled nanoantennas (TECNAs) above a quasi-spherical reflector cavity in response to rapidly changing long-wave infrared radiation. These sensors use a resonant nanoantenna to couple the IR energy to a nanoscale thermocouple. They are positioned over a cavity, etched into the Si substrate, that provides thermal isolation and is designed as an optical element to focus the IR radiation to the antenna. We study the frequency-dependent response of such TECNAs to amplitude-modulated 10.6 μm IR signals. We experimentally demonstrate response times on the order of 3 μs, and a signal bandwidth of about 300 kHz. The observed electrical response is in excellent correlation with finite element method simulations based on the thermal properties of nanostructures. Both experiments and simulations show a key trade-off between sensitivity and response time for such structures and provide solutions for specific target applications.