Guide Pattern Functionalization for Regularly Arranged PS-PDMS Self-Assembled Nanodot Pattern by Brush Treatment
Guide Pattern Functionalization for Regularly Arranged PS-PDMS Self-Assembled Nanodot Pattern by Brush Treatment
复制标题
通过刷子处理对规则排列的 PS-PDMS 自组装纳米点图案进行引导图案功能化
DOI：
10.4028/www.scientific.net/kem.497.116
复制
发表时间：
2011
期刊：
影响因子：
--
通讯作者：
S. Hosaka
中科院分区：
文献类型：
--
作者：
T. Akahane;M. Huda;Takuro Tamura;Y. Yin;S. Hosaka
对导模的刷涂功能化进行了研究。特别是，研究了刷子处理对在引导图案上形成的纳米点的有序化的影响。以聚苯乙烯(PS)-聚二甲基硅氧烷(PDMS)为嵌段共聚物，以聚二甲基硅氧烷(PDMS)为刷子修饰，在导光图案上形成自组装纳米点。用甲苯作溶剂的刷涂处理使电子束抗蚀剂的导引图案表现出与PDMS导引图案相似的行为，并且纳米点具有良好的有序性。结果表明，刷子处理能够使PDMS纳米点规则地定位在EB绘制的引导图案所定义的所需位置。
We have studied functionalization of guide pattern with brush treatment. Especially, the effect of brush treatment on ordering of nanodots formed on the guide pattern was investigated. We used polydimethylsiloxane (PDMS) as brush modification to form self-assembled nanodots on the guide pattern using polystyrene (PS) - PDMS as block copolymer. The brush treatment using toluene solvent made guide patterns of the electron beam (EB) drawn resist behave like PDMS guide patterns and good ordering of the nanodots has been achieved. It was demonstrated that the brush treatment enabled the PDMS nanodots to be regularly located in the desired positions defined by the EB drawn guide patterns.