A study on temperature dependence of an ultrasonic motor for cryogenic environment
A study on temperature dependence of an ultrasonic motor for cryogenic environment
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DOI：
10.7567/jjap.54.07he15
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发表时间：
2015-06
影响因子：
1.5
通讯作者：
Masahiro Nakazono;T. Kanda;D. Yamaguchi;K. Suzumori;Yuya Noguchi
中科院分区：
文献类型：
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作者：
Masahiro Nakazono;T. Kanda;D. Yamaguchi;K. Suzumori;Yuya Noguchi
在这项研究中，我们已经研究了超声波电机的低温环境的温度依赖性。当我们在低温下使用超声波电机时，由于温度的差异，在超声波换能器处引起热应力。因此，对于低温环境，需要调节换能器的预载荷。通过有限元分析，模拟了换能器压电元件的热应力。我们设计的传感器由一个主体和一个螺母制成的SUS 304，和一个螺栓制成的钛。我们已经制造和评估的传感器的温度从4.5到293 K。为了评估预紧力和热应力之间的关系的温度依赖性，我们已经测量了夹紧扭矩和导纳。在4.5 ~ 293 K范围内，最佳夹紧力矩随温度的变化规律为低温。我们还评估了换能器的超声马达的性能。该超声波电机可以在4.5 ~ 293 K的温度范围内驱动，而无需调节换能器的预紧力。
In this study, we have examined the temperature dependence of an ultrasonic motor for a cryogenic environment. When we use an ultrasonic motor at low temperatures, thermal stress is induced at the ultrasonic transducer owing to the difference in temperature. Thus, the preload for the transducer needs to be regulated for a cryogenic environment. By finite element method (FEM) analysis, we have simulated the thermal stress at piezoelectric elements of the transducer. We have designed the transducer consisting of a body and a nut made of SUS304, and a bolt made of titanium. We have fabricated and evaluated the transducer at temperatures from 4.5 to 293 K. To evaluate the temperature dependence of the relationship between the preload and the thermal stress, we have measured the clamping torque and admittance. The optimal clamping torque shows a low-temperature dependence from 4.5 to 293 K. We have also evaluated the performance of an ultrasonic motor of the transducer. The ultrasonic motor can be driven at temperatures from 4.5 to 293 K without the regulation of the preload of the transducer.