Implementing Transmission Electron Backscatter Diffraction for Atom Probe Tomography
Implementing Transmission Electron Backscatter Diffraction for Atom Probe Tomography
复制标题
实现原子探针断层扫描的透射电子背散射衍射
DOI：
10.1017/s1431927616011296
复制
发表时间：
2016
影响因子：
2.8
通讯作者：
D. Larson
中科院分区：
文献类型：
--
作者：
K. Rice;Yimeng Chen;T. Prosa;D. Larson
摘要：将透射电子背散射衍射 (tEBSD) 与基于聚焦离子束的原子探针断层扫描 (APT) 样品制备结合起来具有优势。虽然 tEBSD 允许用户识别晶界的位置和特征，然后可以与 APT 结合以提供晶界的完整化学和取向表征，但 tEBSD 还可以提供成像信息，通过确保目标晶界在 APT 样品内的正确放置来改进 APT 样品制备过程。在本报告中，我们讨论了样品倾斜角度、离子束铣削能量以及其他考虑因素，以优化 APT 样品几何形状的菊池衍射图案质量。对镍基 Inconel 600 合金中晶界的协调样品制备和分析用于说明揭示 50° 取向差和微量元素偏析到晶界的方法。
Abstract There are advantages to performing transmission electron backscattering diffraction (tEBSD) in conjunction with focused ion beam-based specimen preparation for atom probe tomography (APT). Although tEBSD allows users to identify the position and character of grain boundaries, which can then be combined with APT to provide full chemical and orientation characterization of grain boundaries, tEBSD can also provide imaging information that improves the APT specimen preparation process by insuring proper placement of the targeted grain boundary within an APT specimen. In this report we discuss sample tilt angles, ion beam milling energies, and other considerations to optimize Kikuchi diffraction pattern quality for the APT specimen geometry. Coordinated specimen preparation and analysis of a grain boundary in a Ni-based Inconel 600 alloy is used to illustrate the approach revealing a 50° misorientation and trace element segregation to the grain boundary.