A heterodyne interferometer constructed in an integrated optics and its metrological evaluation of a picometre-order periodic error
A heterodyne interferometer constructed in an integrated optics and its metrological evaluation of a picometre-order periodic error
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DOI：
10.1016/j.precisioneng.2018.04.020
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发表时间：
2018-10
期刊：
影响因子：
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通讯作者：
S. Yokoyama;Y. Hori;Toshiyuki Yokoyama;A. Hirai
中科院分区：
文献类型：
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作者：
S. Yokoyama;Y. Hori;Toshiyuki Yokoyama;A. Hirai
众所周知，外差干涉仪的周期误差将测量精度限制在纳米量级。它主要源自干涉仪光学器件中的混频，并且可以使用具有两个空间分离的光束的配置来解决这个问题。然而，仍然存在与寄生反射相关的周期性误差。最近，我们开发了一种具有两个空间分离光束的差分单路外差干涉仪，该干涉仪构建在单个小型准立方光学单元内，以最大限度地减少寄生反射。本文采用“振幅法”和“减法法”两种评价方法对该干涉仪的残余周期误差进行了评价，并对结果进行了比较。通过对结果应用不确定性估计程序，这两种方法表现出高度一致性，证实了我们评估结果的可靠性。该干涉仪的λ/2周期误差为7.6 pm。
It is known that the periodic error of heterodyne interferometers limits the accuracy of measurement to nanometre order. It is mainly derived from frequency mixing in the interferometer optics and this can be resolved using the configuration with two spatially separated beams. However, there remains a periodic error associated with parasitic reflections. Recently, we have developed a differential single-path heterodyne interferometer with two spatially separated beams, which was constructed within a single small quasi-cubic optical unit to minimize the parasitic reflections. In this work, the residual periodic error of this interferometer was evaluated with two evaluation methods, ‘the amplitude method’ and ‘the subtraction method’, and their results were compared. By applying uncertainty estimation procedures to the results, these two methods were shown to be highly consistent, confirming the reliability of our evaluation results. The error in λ/2 period of this interferometer was 7.6 pm.