Sub-nanometer band pass coatings for LIDAR and astronomy

Sub-nanometer band pass coatings for LIDAR and astronomy
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用于激光雷达和天文学的亚纳米带通涂层

DOI：
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发表时间：
2015
期刊：
SPIE Optical Engineering + Applications
影响因子：
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通讯作者：
Robert L. Johnson
Robert L. Johnson
中科院分区：
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文献类型：
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作者：
Markus Fredell;G. Carver;S. Chanda;S. Locknar;Robert L. Johnson

文献摘要

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超窄带通滤波器用于最大化 LIDAR 范围和灵敏度。提出了带宽低至四分之一纳米、透射率达 95% 的亚纳米带通滤波器的替代设计和测量的制造结果。热敏感度和角度敏感度已降至最低。该滤波器采用双源等离子体辅助磁控溅射技术制造。提出了单腔和多腔设计。
Ultra-narrow band pass filters are used to maximize LIDAR range and sensitivity. Alternate designs and measured fabrication results are presented for sub-nanometer band pass filters down to quarter nanometer bandwidths with 95% transmission. Thermal and angle sensitivity have been minimized. The filters are fabricated using dual source, plasma assisted magnetron sputtering. Single and multi-cavity designs are presented.