Empirical-Statistical Study on the Relationship between Deposition Parameters, Process Variables, Deposition Rate and Mechanical Properties of a-C:H:W Coatings
Empirical-Statistical Study on the Relationship between Deposition Parameters, Process Variables, Deposition Rate and Mechanical Properties of a-C:H:W Coatings
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DOI：
10.3390/coatings4040772
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发表时间：
2014-12-01
期刊：
影响因子：
3.4
通讯作者：
Wartzack, Sandro
中科院分区：
文献类型：
--
作者：
Hetzner, Harald;Schmid, Christoph;Wartzack, Sandro
采用反应磁控溅射碳化钨靶在氩气-乙炔气氛中在高速钢表面制备了钨改性氢化非晶碳涂层。沉积参数，溅射功率，偏压，氩气和乙炔流量，根据一个中心复合设计，包括25个不同的参数组合而变化。为了比较，还沉积碳化钨涂层。在涂层沉积过程中，工艺变量，总压力，溅射电压和偏置电流，作为工艺特性进行了测量。使用凹坑研磨法确定沉积涂层的厚度，并计算沉积速率。杨氏模量E和压痕硬度H-IT的特征在于通过纳米压痕。当E = 80 - 253 GPa和H-IT = 7.8 - 22.0 GPa时，发现不同a-C：H：W变体之间的机械性能差异很大。使用统计方法，它表明，这些属性，以及沉积速率显着依赖于所有四个不同的参数。尽管参数对模量和硬度的影响非常相似，并且两种性能的相关性非常强，但统计学上指出，作为耐磨性指标的H/E比可以以有针对性的方式进行调整，并且具有一定程度的独立性。
Tungsten-modified hydrogenated amorphous carbon coatings (a-C:H:W) were deposited on high speed steel by reactive magnetron sputtering of a tungsten carbide target in an argon-ethine atmosphere. The deposition parameters, sputtering power, bias voltage, argon and ethine flow rate, were varied according to a central composite design comprising 25 different parameter combinations. For comparison, a tungsten carbide coating was deposited, as well. During coating deposition, the process variables, total pressure, sputtering voltage and bias current, were measured as process characteristics. The thickness of the deposited coatings was determined using the crater grinding method, and the deposition rate was calculated. Young's modulus E and indentation hardness H-IT were characterized by means of nanoindentation. With E = 80 - 253 GPa and H-IT = 7.8 - 22.0 GPa, the mechanical properties were found to vary strongly in between different a-C:H:W variants. Using statistical methods, it is shown that these properties, as well as the deposition rate significantly depend on all four varied parameters. Despite a very similar influence of the parameters on modulus and hardness, as well as a very strong correlation of both properties, it is pointed out statistically that the H/E ratio, which is an indicator of the wear resistance, can be adapted in a targeted way and with some degree of independence.