A novel MEMS pressure sensor fabricated on an optical fiber
A novel MEMS pressure sensor fabricated on an optical fiber
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DOI：
10.1109/68.942671
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发表时间：
2001-09-01
影响因子：
2.6
通讯作者：
Jackson, HE
中科院分区：
文献类型：
--
作者：
Abeysinghe, DC;Dasgupta, S;Jackson, HE
我们描述了一种新型的光学询问，微机电系统（MEMS）压力传感器，其中整个MEMS结构直接制造在光纤上的制造和初始测试。一种新的微加工工艺，用于在一个平坦的光纤端面，包括光刻图案化，湿法蚀刻的腔，和阳极键合的硅隔膜上使用。我们采用了200和400微米直径的多模光纤。在光纤上制造的压力传感器已经被测试，显示出对静态压力（0-80 psi）的近似线性响应。该传感器预计将在小尺寸是有利的和密集阵列可能是有用的情况下找到应用。
We describe the fabrication, and initial testing of a novel optically interrogated, microelectromechanical system (MEMS) pressure sensor in which the entire MEMS structure is fabricated directly on an optical fiber. A new micromachining process for use on a flat fiber end face that includes photolithographic patterning, wet etching of a cavity, and anodic bonding of a silicon diaphragm is utilized. We have employed both 200- and 400-mum-diameter multimode optical fibers. A pressure sensor fabricated on an optical fiber has been tested displaying an approximately linear response to static pressure (0-80 psi). This sensor is expected to find application in situations where small size is advantageous and where dense arrays may be useful.