A Surface Encoder with a Multi-Spot Light Source.
A Surface Encoder with a Multi-Spot Light Source.
复制标题
具有多点光源的表面编码器。
DOI：
10.2493/jjspe.68.70
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发表时间：
2002
影响因子：
--
通讯作者：
S. Kiyono
中科院分区：
文献类型：
--
作者：
W. Gao;Tadashi Hoshino;Y. Shimizu;S. Kiyono
本文介绍了一种多点光源的面编码器。表面编码器由在其表面上具有二维（2D）正弦角图案的角网格和用于检测网格表面的2D角度轮廓的2D角度传感器组成。2D XY位移和倾斜运动（俯仰、滚动和偏航）可以由表面编码器检测。本文采用多点光源作为角度传感器。来自光源的多束光在不同的周期以相同的相位位置投射到角网格表面上。平均效应大大降低了角网格的间距空间的分散效应，角网格用作表面编码器的测量参考。将半导体激光器与光栅膜相结合，产生了与实验中所用角光栅相同的节距为300 μm的多光斑光束。采用多点光源的面编码器显示出良好的性能。一个自校准技术也适用于校准表面编码器。
This paper describes a surface encoder with a multi-spot light source. The surface encoder consists of an angle grid having a two-dimensional (2D) sinusoidal angular pattern on its surface, and a 2D angle sensor used to detect the 2D angle profile of the grid surface. The 2D XY displacements and tilt motions (pitch, roll and yaw) can be detected by the surface encoder. In this paper, a multi-spot light source is employed in the angle sensor. The multi-beams from the light source are projected onto the angle grid surface at the same phase positions in different periods. An averaging effect greatly reduces the effect of the dispersion of the pitch spaces of the angle grid, which acts as the measurement reference of the surface encoder. A laser diode and a grid film are combined to generate the multi-spot beams with pitch spaces of 300 μm, which are the same as those of the angle grid used in the experiments. The surface encoder with the multi-spot light source shows a good performance. A selfcalibration technique is also applied to calibrate the surface encoder.