Temperature-insensitive micromachined AlGaAs-GaAs vertical cavity filter
Temperature-insensitive micromachined AlGaAs-GaAs vertical cavity filter
复制标题
温度不敏感微机械 AlGaAs-GaAs 立式空腔滤波器
DOI：
10.1109/68.841269
复制
发表时间：
2000
影响因子：
2.6
通讯作者：
K. Iga
中科院分区：
文献类型：
--
作者：
T. Amano;F. Koyama;N. Nishiyama;K. Iga
我们已经证明了一个温度不敏感的微机械垂直腔滤波器与AlGaAs-GaAs分布布拉格反射器（DBR），它可以热调谐的差热膨胀。实现的温度依赖性小至+0.01nm/K，这是传统的基于半导体的光学滤波器的温度依赖性的十分之一。
We have demonstrated a temperature-insensitive micromachined vertical cavity filter with an AlGaAs-GaAs distributed Bragg reflector (DBR), which can be thermally tuned by differential thermal expansion. The achieved temperature dependence was as small as +0.01 nm/K, which is one-tenth of that of conventional semiconductor based optical filters.