Exploring electromechanical utility of GaAs interdigitated transducers; using finite-element-method-based parametric analysis and experimental comparison
Exploring electromechanical utility of GaAs interdigitated transducers; using finite-element-method-based parametric analysis and experimental comparison
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DOI：
10.1116/6.0002169
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发表时间：
2023-01
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影响因子：
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通讯作者：
B. Rummel;L. Miroshnik;Andrew B. Li;Grant D. Heilman;G. Balakrishnan;T. Sinno;S. Han
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文献类型：
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作者：
B. Rummel;L. Miroshnik;Andrew B. Li;Grant D. Heilman;G. Balakrishnan;T. Sinno;S. Han
叉指换能器的分析通常依赖于现象学模型来近似器件的电气性能。虽然这些方法被证明是必不可少的信号处理应用，现象学模型提供有限的信息设备的机械响应和物理特性所产生的声场。相比之下，有限元法建模提供了一个强大的平台来研究整个器件几何形状对叉指换能器器件的关键性能参数的影响。在这项研究中，我们制作了一个表面声波谐振器上半绝缘砷化镓[公式：见文字]，它包括一个叉指换能器和声镜组件。该装置随后使用有限元软件建模。利用矢量网络分析仪对实验器件的散射响应进行了测量，测量结果与仿真结果吻合较好。通过接触式原子力显微镜测量了实验装置的波动特性，验证了模拟的机械响应预测。我们进一步表明，计算参数分析可用于优化串联谐振频率，有效耦合系数，品质因数和最大声表面位移的设备设计。
Analysis of interdigitated transducers often relies on phenomenological models to approximate device electrical performance. While these approaches prove essential for signal processing applications, phenomenological models provide limited information on the device’s mechanical response and physical characteristics of the generated acoustic field. Finite element method modeling, in comparison, offers a robust platform to study the effects of the full device geometry on critical performance parameters of interdigitated transducer devices. In this study, we fabricate a surface acoustic wave resonator on semi-insulating GaAs [Formula: see text], which consists of an interdigitated transducer and acoustic mirror assembly. The device is subsequently modeled using fem software. A vector network analyzer is used to measure the experimental device scattering response, which compares well with the simulated results. The wave characteristics of the experimental device are measured by contact-mode atomic force microscopy, which validates the simulation’s mechanical response predictions. We further show that a computational parametric analysis can be used to optimize device designs for series resonance frequency, effective coupling coefficient, quality factor, and maximum acoustic surface displacement.