Deposition of WS2/DLC Nano-composite Films and Their Tribological Properties
Deposition of WS2/DLC Nano-composite Films and Their Tribological Properties
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DOI：
10.4139/sfj.56.535
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发表时间：
2005
期刊：
影响因子：
--
通讯作者：
Junichi Noshiro;S. Watanabe;Takahiko Sakurai;S. Miyake
中科院分区：
文献类型：
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作者：
Junichi Noshiro;S. Watanabe;Takahiko Sakurai;S. Miyake
In recent years, diamond-like carbon (DLC) films are attracting attention as excellent tribomaterials due to their excellent characteristics, such as their high hardness, smooth surface, antiwear property, and lubrication characteristics, and they are used in various fields. However, both the friction coefficient and endurance life of DLC films are in sufficient, depending on the application environment. Therefore, in this study, with the aim of improving tribological characteristics, we fabricated WS2/DLC films by co-sputtering under various conditions, using a multicathode sputtering system, with graphite and WS2 as targets. Cross sections of the films fabricated were observed by transmission electron microscopy. In addition, the composition and structure of the films were analyzed by Raman spectroscopy and Auger electron spectroscopy. Measurement of the friction and wear characteristics of the films was performed using a ball-on-disk friction tester. As a result, we found that the films show a nano-dispersed structure, a nano-layered structure or a random-layered structure, depending on the deposition conditions. Films having a nano-dispersed structure or nano-layered structure show friction and wear characteristics superior to those of a DLC-only film.
