Optimization of slider contact face geometry for surface acoustic wave motor
Optimization of slider contact face geometry for surface acoustic wave motor
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声表面波电机滑块接触面几何形状优化
DOI：
10.1109/memsys.2001.906526
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发表时间：
2001
期刊：
影响因子：
--
通讯作者：
T. Higuchi
中科院分区：
文献类型：
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作者：
M. Kurosawa;H. Itoh;K. Asai;M. Takasaki;T. Higuchi
据报道，一种输出力极大的表面声波（SAW）电机。 SAW 器件的驱动频率为 9.6 MHz。滑块是通过硅表面加工制造的。对于接触面，滑块有很多凸起来控制弹性接触情况。测试了二十五个不同的投影设计。使用4/spl次/4mm/sup 2/硅表面微制造滑块，最大输出力为7.6N。即，其约为0.5N/mm/sup 2/ 或50N/cm/sup 2/。实验中电机空载速度为0.7 m/sec。预计该执行器的机械输出功率为1W。机械输出力和输出功率是MEMS执行器中最好的。
An extremely large output force surface acoustic wave (SAW) motor is reported. Driving frequency of the SAW device was 9.6 MHz. Sliders were fabricated with silicon surface machining. For the contact surface, the slider had a lot of projections to control elastic contact condition. Twenty five different projection designs were tested. Using a 4/spl times/4 mm/sup 2/ silicon surface micro fabricated slider, the maximum output force was 7.6 N. Namely, it was about 0.5 N/mm/sup 2/ or 50 N/cm/sup 2/. The no-loaded speed of the motor was 0.7 m/sec in the experiment. Estimated mechanical output power of the actuator was 1 W. The mechanical output force and output power are the best of all in MEMS actuators.