Decreasing of the thermal conductivity of Si nanopillar/SiGe composite films investigated by using a piezoelectric photothermal spectroscopy
Decreasing of the thermal conductivity of Si nanopillar/SiGe composite films investigated by using a piezoelectric photothermal spectroscopy
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压电光热光谱研究 Si 纳米柱/SiGe 复合薄膜热导率的降低
DOI:
10.35848/1347-4065/ab82a6
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发表时间:
2020
影响因子:
1.5
通讯作者:
and Atsuhiko Fukuyama
中科院分区:
文献类型:
--
作者:
Tomoki Harada;Tsubasa Aki;Daisuke Ohori;Seiji Samukawa;Tetsuo Ikari;and Atsuhiko Fukuyama