Deep-UV nonlinear optical crystal KBe2BO3F2-discovery, growth, optical properties and applications
Deep-UV nonlinear optical crystal KBe2BO3F2-discovery, growth, optical properties and applications
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DOI：
10.1007/s00340-009-3554-4
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发表时间：
2009-09-01
影响因子：
2.1
通讯作者：
Xu, Z. Y.
中科院分区：
文献类型：
--
作者：
Chen, C. T.;Wang, G. L.;Xu, Z. Y.
本文详细介绍了非线性光学晶体KBe_2BO_3F_2（KBBF）的发现历史，详细描述了它的生长、空间结构、光学性质以及产生深紫外（UV）谐波的能力。综述了近年来全固态深紫外光源在超高分辨率激光光电子谱仪和193 nm光刻等方面的重要应用。
This review introduces in detail the history of the discovery of the nonlinear optical crystal KBe2BO3F2 (KBBF), with a full description of its growth, space structure, optical properties, and capability to generate deep-ultraviolet (UV) harmonic generation. Several important applications developed recently using all-solid-state deep-UV light sources, such as super-high-resolution laser photoemission spectrograph and 193 nm photolithography, will be reviewed.