N. Tohge: "Formation of Organic Polymer-Containing Gel Films and Their Application to the Fine-Patterning Process" J. Ceram. Soc. Jpn.96. 127-130 (1988)
N. Tohge: "Formation of Organic Polymer-Containing Gel Films and Their Application to the Fine-Patterning Process" J. Ceram. Soc. Jpn.96. 127-130 (1988)
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N. Tohge:“含有机聚合物的凝胶薄膜的形成及其在精细图案化过程中的应用”J. Ceram。
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