POLYMER MICROSTRUCTURES FORMED BY MOLDING IN CAPILLARIES
POLYMER MICROSTRUCTURES FORMED BY MOLDING IN CAPILLARIES
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DOI：
10.1038/376581a0
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发表时间：
1995-08-17
期刊：
影响因子：
64.8
通讯作者：
WHITESIDES, GM
中科院分区：
文献类型：
--
作者：
KIM, E;XIA, YN;WHITESIDES, GM
在微米尺度上形成图案化结构对于许多电子、光学和机械器件的制造是必不可少的（1）。图案化技术在半导体和金属方面已经得到了很好的发展，但在有机聚合物方面相对不发达（在光刻中使用的专用聚合物是一个明显的例外（1））。一些结构的聚合物复制品已经通过用随后聚合的单体填充它们而形成（2-5）。但是这些方法有重要的局限性，因为它们通常涉及模板结构的破坏，或者所得的结构对于大多数应用来说不够规则。在这里，我们描述了一种不受这些限制的一般模制过程。对于模具，我们使用当基底和图案化的弹性体母版紧密接触时形成的连续通道网络。将低粘度聚合物前体与网络接触，然后通过毛细作用自发填充。在交联前体之后，移除母版（并且可以重复使用），留下图案化的聚合物层;根据基底的选择，可以类似地产生图案化的自支撑膜。
THE formation of patterned structures on micrometre-length scales is essential for the fabrication of many electronic, optical and mechanical devices(1). Patterning technologies are well established for semiconductors and metals, but are relatively undeveloped for organic polymers (with the notable exception of the specialized polymers used in photolithigraphy(1)). Polymeric replicas of some structures have been formed by filling them with monomers which are subsequently polymerized(2-5). But these procedures have important limitations, in that they usually involve the destruction of the template structure, or the resulting structures are not sufficiently regular for most applications. Here we describe a general moulding procedure which does not suffer from these limitations. For the mould we use the continuous network of channels formed when a substrate and a patterned elastomeric master are placed in intimate contact. A low-viscosity polymer precursor is placed in contact with the network, which then fills spontaneously by capillary action. After cross-linking the precursor, the master is removed (and can be reused), leaving a patterned polymer layer; depending on the choice of substrate, patterned free-standing films can be similarly produced.