Physical properties of ZnO:F obtained from a fresh and aged solution of zinc acetate and zinc acetylacetonate
Physical properties of ZnO:F obtained from a fresh and aged solution of zinc acetate and zinc acetylacetonate
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DOI：
10.1016/j.solmat.2005.04.011
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发表时间：
2006-04
影响因子：
6.9
通讯作者：
A. Maldonado;S. Tirado-Guerra;M. Meléndez-Lira;M. Olvera
中科院分区：
文献类型：
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作者：
A. Maldonado;S. Tirado-Guerra;M. Meléndez-Lira;M. Olvera
采用喷雾热解技术在钠钙玻璃衬底上制备了掺氟氧化锌薄膜。分别使用两种不同的锌前驱体，即醋酸锌和戊二酸锌。研究了锌前驱体类型、起始溶液老化、衬底温度和真空退火处理对薄膜的电学、形貌、结构和光学性能的影响，以期获得导电透明的薄膜。陈化溶液中沉积的ZnO：F薄膜的电阻率值低于新鲜溶液中制备的薄膜。以醋酸锌和戊二酸锌为起始溶液，在5 0 0℃下沉积的薄膜的最低电阻率分别为1.4×10−2和1.8×10−2Ωcm。在400℃，30min的真空退火处理后，薄膜的电阻率下降，从醋酸锌老化溶液中沉积的薄膜的最小电阻率为6.5×10−3Ωcm。薄膜均为多晶结构，均有(002)择优取向。扫描电子显微镜观察表明，涂层表面均匀覆盖有圆形颗粒。使用不同的前驱体，表面形貌没有明显的变化。薄膜在可见光区的透过率大于80%。
Fluorine-doped zinc oxide thin films, ZnO:F, were deposited by the spray pyrolysis technique on sodocalcic glass substrates. Two different zinc precursors were used separately, namely, zinc acetate and zinc pentanedionate. The effect of the zinc precursor type, the aging of the starting solution, the substrate temperature and a vacuum-annealing treatment on the electrical, morphological, structural and optical properties was studied, in order to obtain conductive and transparent ZnO:F thin films. The resistivity values of ZnO:F thin films deposited from aged solutions were lower than those films obtained from fresh solutions. The lowest resistivity values of as-grown films deposited at 500°C, using a two-day aged starting solution of zinc acetate and zinc pentanedionate, were 1.4×10−2and 1.8×10−2Ωcm, respectively. After a vacuum annealing treatment performed at 400°C for 30min a decrease in the resistivity was obtained, reaching a minimum value of 6.5×10−3Ωcm for films deposited from an aged solution of zinc acetate. The films were polycrystalline, with a (002) preferential growth orientation in all the cases. Micrographs obtained by SEM show a uniform surface covers by rounded grains. No evident change in the surface morphology was observed with the different precursors used. The transmittance of films in the visible region was higher than 80%.