Reflection of Blue Light Using Bi-Layer Al2O3-TiO2 E-Beam Coating Films
Reflection of Blue Light Using Bi-Layer Al2O3-TiO2 E-Beam Coating Films
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使用双层 Al2O3-TiO2 电子束镀膜反射蓝光
DOI：
10.1021/acs.cgd.8b00805
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发表时间：
2018-09-01
影响因子：
3.8
通讯作者：
Chen, Yushan
中科院分区：
文献类型：
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作者：
Liu, Jing;Lin, Chi-Yu;Chen, Yushan
使用电子束沉积在300 ℃下在玻璃基板上存款Al 2 O 3和TiO 2单层膜，在沉积过程中引入6 sccm O-2。进行膜的光学表征以评估厚度是否适合于形成多对反射涂层。在450 nm的光学波长下测量的膜的折射率为1.742（Al 2 O3）和2.206（TiO 2）。采用电子束沉积技术在玻璃衬底上分别以1、2、4、6个周期沉积存款Al 2 O3-TiO 2双层膜，制备了蓝光宽带布拉格反射膜。四分之一波长条件下的Al 2 O3和TiO 2膜的厚度分别为51和64 nm。当在玻璃基片上沉积一周期的Al 2 O3-TiO 2双层膜时，膜具有高的透明度，并且没有观察到反射效应。当在玻璃衬底上沉积两个、四个和六个周期时，布拉格反射效应变得明显。反射率比也随着周期数的增加而增加。横截面的观察表明，每个Al 2 O3和TiO 2薄膜可以很好地沉积在玻璃基板上使用电子束沉积。Al_2O_3和TiO_2薄膜的厚度与预期值之间存在偏差，导致Al_2O_3-TiO_2双层薄膜布拉格反射效应的中心频率和带宽发生变化。我们从理论上解释了为什么薄膜厚度的偏差会导致（i）理论和测量的反射光谱之间的差异以及（ii）理论和测量的中心频率和带宽值之间的差异。
E-beam deposition was used to deposit Al2O3 and TiO2 single-layer films onto glass substrates at 300 degrees C, with 6 sccm O-2 being introduced during the deposition process. Optical characterization of the films was conducted to evaluate whether the thickness was suitable for the formation of multipair reflective coatings. The refractive indices of the films measured at an optical wavelength of 450 nm were 1.742 (Al2O3) and 2.206 (TiO2). E-beam deposition was then used to deposit Al2O3-TiO2 bilayer films in one, two, four, and six periods on glass substrates to fabricate multilayer films as broadband Bragg-reflecting coatings for blue light. The thicknesses of the Al2O3 and TiO2 films for the quarter wave condition were 51 and 64 nm, respectively. When one period of Al2O3-TiO2 bilayer film was deposited on the glass substrate, the film had high transparency, and no reflective effect was observed. As two, four, and six periods were deposited on the glass substrates, the Bragg reflection effect became apparent. The reflectance ratio also increased with the number of periods. Cross-sectional observations showed that each Al2O3 and TiO2 film could be deposited well on glass substrates using E-beam deposition. The thicknesses of the Al2O3 and TiO2 films would have deviations to achieve an expected value, causing variations in the central frequency and bandwidth of the Bragg reflection effect for the Al2O3-TiO2 bilayer films. We theorize as to why deviations in the films' thicknesses caused differences between (i) the theoretical and measured reflective spectra and (ii) the theoretical and measured central frequency and bandwidth values.