An integrated micromachined waveguide frequency tripler for nonlinear wave propagation
An integrated micromachined waveguide frequency tripler for nonlinear wave propagation
复制标题
用于非线性波传播的集成微机械波导频率三倍器
DOI：
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发表时间：
2004
期刊：
影响因子：
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通讯作者：
K. Gołaszewska
中科院分区：
文献类型：
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作者：
W. Chow;D. Steenson;T. Piotrowski;A. Piotrowska;K. Gołaszewska
一个集成的混合封装的宽带谐波产生，其中包括一个频率的三倍频和微加工波导已被设计和制造，并已初步证明了宽范围的输出频率高达600 GHz。该方法的本质是整个三倍频器单片生产，并采用了新的HBV设备电气和机械互连的低损耗SU-8膜。这项工作的整个概念是设计一个具有成本效益和紧凑的三倍频封装表现出高的非线性，同时最大限度地减少器件的串联电阻和部分寄生效应，以实现更高的转换效率，并在亚毫米波和太赫兹频率的应用具有很高的商业潜力。
An integrated hybrid package for broadband harmonic generation which consists of a frequency tripler and a micro-machined waveguide has been designed and fabricated and has initially demonstrated a broad range of output frequencies up to 600 GHz. The essence of the approach is that the entire frequency tripler is produced monolithically and incorporates novel HBV devices electrically and mechanically interconnected by a low loss SU-8 membrane. The entire concept of this work is to design a cost effective and compact frequency tripler package exhibiting high nonlinearity whilst minimizing the device series resistance and section parasitics for achieving higher conversion efficiency, and with a high commercial potential for applications at submillimeter wave and Terahertz frequencies.