3D Strain Measurement of Heterostructures Using the Scanning Transmission Electron Microscopy Moiré Depth Sectioning Method
3D Strain Measurement of Heterostructures Using the Scanning Transmission Electron Microscopy Moiré Depth Sectioning Method
复制标题
DOI：
10.1002/smtd.202300107
复制
发表时间：
2023-06
期刊：
影响因子：
12.4
通讯作者：
H. Wen;Hongye Zhang;Run Peng;Chao Liu;Shuman Liu;Feng-qi Liu;H. Xie;Zhanwei Liu
中科院分区：
文献类型：
--
作者：
H. Wen;Hongye Zhang;Run Peng;Chao Liu;Shuman Liu;Feng-qi Liu;H. Xie;Zhanwei Liu
微纳米材料的力学性能直接决定了异质结构、微结构和微器件的可靠性。因此，对纳米尺度的三维应变场进行准确的评估是很重要的。提出了一种扫描透射式电子显微镜(STEM)莫尔深度切片方法。通过优化电子探针在材料不同深度的扫描参数，获得了大视场、可达数百纳米的序列STEM莫尔条纹(STEM-MFS)。然后，构建三维STEM云纹信息。在一定程度上实现了从纳米到亚微米的多尺度三维应变场测量。用该方法精确测量了异质界面和单位错附近的三维应变场。
The mechanical properties of micro‐ and nanoscale materials directly determine the reliability of heterostructures, microstructures, and microdevices. Therefore, an accurate evaluation of the 3D strain field at the nanoscale is important. In this study, a scanning transmission electron microscopy (STEM) moiré depth sectioning method is proposed. By optimizing the scanning parameters of electron probes at different depths of the material, the sequence STEM moiré fringes (STEM‐MFs) with a large field of view, which can be hundreds of nanometers obtained. Then, the 3D STEM moiré information constructed. To some extent, multi‐scale 3D strain field measurements from nanometer to the submicrometer scale actualized. The 3D strain field near the heterostructure interface and single dislocation accurately measured by the developed method.