Reducing anchor loss in micromechanical extensional mode resonators
Reducing anchor loss in micromechanical extensional mode resonators
复制标题
减少微机械拉伸模式谐振器中的锚损耗
DOI：
--
复制
发表时间：
2010
期刊：
影响因子：
--
通讯作者：
A. Atalar
中科院分区：
文献类型：
--
作者：
Vahdettin Taş;S. Olçum;M. Aksoy;A. Atalar
在这项工作中，我们提出了一种新的方法，以增加延伸模式的微机械谐振器的质量因素。所提出的谐振器拓扑适用于基于硅的工艺进行集成，以制造微机械滤波器和振荡器。它是由静电力纵向激发的半波长长条带，并且通过与四分之一波长长的条交替与基板分离。该结构在谐振器和底物之间导致较大的阻抗不匹配，因此大大减少了锚固损失。谐振器的性能由有限元模拟确定。我们引入了等效电路，以预测谐振器的性能。电气模型给出了与有限元模拟一致的结果。提出的谐振器预计将具有很小的锚固损失，导致Q非常高。
In this work, we propose a novel method to increase the quality factor of extensional mode micromechanical resonators. The proposed resonator topology is suitable for integration in a silicon-based process to fabricate micromechanical filters and oscillators. It is a half-wavelength-long strip excited longitudinally by electrostatic forces, and it is isolated from the substrate by alternating with bars of a quarter wavelength long. This structure causes a large impedance mismatch between the resonator and the substrate and hence reduces the anchor loss considerably. The performance of the resonator is determined by finite element simulations. We introduce an equivalent electrical circuit to predict the performance of the resonator. The electrical model gives results consistent with the finite element simulations. The proposed resonator is expected to have a very small anchor loss resulting in a very high Q.