Nanometer‐size surface features produced by single, low energy, highly charged ions
Nanometer‐size surface features produced by single, low energy, highly charged ions
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DOI：
10.1116/1.588210
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发表时间：
1995-05
影响因子：
1.4
通讯作者：
D. Parks;R. Bastasz;R. Schmieder;M. Stockli
中科院分区：
文献类型：
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作者：
D. Parks;R. Bastasz;R. Schmieder;M. Stockli
我们研究了慢高电荷态离子（Xe ~（44+）0.1-20 keV/q）极限下离子与固体表面的相互作用。使用原子力显微镜，我们能够看到云母上的单个离子撞击点，大约每个入射离子一个点。这样的特征通常是直径为20 nm的圆形。这种损伤可能是由局部电荷耗尽和离子的50 keV库仑势能的转换引起的。接触模式显微镜显示的功能，要么是坑或水泡取决于扫描方向和尖端和基板之间的力。通过使用横向力显微镜，我们看到这些特征是摩擦增加的区域。观察到的表面损伤是独立的离子动能。在同一区域上重复扫描会导致所观察到的特征的擦除。
We have studied the interaction of ions with solid surfaces in the limit of slow, highly charged ions (Xe44+ 0.1–20 keV/q). Using atomic force microscopy we are able to see individual ion impact sites on mica, approximately one site per incident ion. Such features are typically circular with ∼20 nm diameter. This damage may be caused by local charge depletion and conversion of the 50 keV Coulomb potential energy of the ions. Contact mode microscopy shows the features to be either pits or blisters depending on scanning direction and force between tip and substrate. By using lateral force microscopy we see the features to be regions of increased friction. The observed surface damage is independent of the ion kinetic energy. Repeated scanning over the same region causes erasure of the observed features.