128X128 DEFORMABLE MIRROR DEVICE

128X128 DEFORMABLE MIRROR DEVICE
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DOI:
10.1109/t-ed.1983.21163
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发表时间:
1983-01-01
影响因子:
3.1
通讯作者:
HORNBECK, LJ
HORNBECK, LJ
中科院分区:
工程技术2区
文献类型:
--
作者:
HORNBECK, LJ

文献摘要

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可变形镜像器件(DMD)是由下层MOS晶体管阵列寻址的可变形镜像元件阵列。应用包括光学信息处理和投影显示。给出了128×128DMD的结构、工作原理和实验结果。
The deformable mirror device (DMD) is anarray of deformable mirror elements addressed by an underlying array of MOS transistors. Applications include optical information processing and projection displays. The architecture, operation, and experimental results are presented for a 128 × 128 DMD.