Crack-Free Periodic Porous Thin Films Assisted by Plasma Irradiation at Low Temperature and Their Enhanced Gas-Sensing Performance
Crack-Free Periodic Porous Thin Films Assisted by Plasma Irradiation at Low Temperature and Their Enhanced Gas-Sensing Performance
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低温等离子体辐照辅助的无裂纹周期性多孔薄膜及其增强的气敏性能。
DOI：
10.1002/chem.201301137
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发表时间：
2013-09-27
影响因子：
4.3
通讯作者：
Cai, Weiping
中科院分区：
文献类型：
--
作者：
Dai, Zhengfei;Jia, Lichao;Cai, Weiping
均匀的薄膜是高性能气体传感器的首选，因为它们具有显着的重现性和长期稳定性。在这项工作中，提出了一种低温制备路线，制备无裂纹和均匀的金属氧化物周期性多孔薄膜的氧等离子体照射，而不是高温退火，通过使用牺牲胶体模板。以金红石型SnO2为例，验证了该方法的有效性。在带有电极的基底上原位合成了无裂纹、均匀的多孔薄膜。通过等离子体辐照获得的SnO2多孔薄膜富含表面OH基团，因此具有超亲水性。它具有更均匀的结构和更低的电阻比通过退火产生的多孔膜。更重要的是，这样的薄膜显示更高的灵敏度，更低的检测阈值（100 ppb的丙酮）和更好的耐久性比那些已经直接退火，从而提高气敏性能。该方法可应用于其他金属氧化物薄膜的均匀化制备和高性能气敏器件的制备。
Homogenous thin films are preferable for high-performance gas sensors because of their remarkable reproducibility and long-term stability. In this work, a low-temperature fabrication route is presented to prepare crack-free and homogenous metal oxide periodic porous thin films by oxygen plasma irradiation instead of high temperature annealing by using a sacrificial colloidal template. Rutile SnO2 is taken as an example to demonstrate the validity of this route. The crack-free and homogenous porous thin films are successfully synthesized on the substrates in situ with electrodes. The SnO2 porous thin film obtained by plasma irradiation is rich in surface OH groups and hence superhydrophilic. It exhibits a more homogenous structure and lower resistance than porous films generated by annealing. More importantly, such thin films display higher sensitivity, a lower detection threshold (100 ppb to acetone) and better durability than those that have been directly annealed, resulting in enhanced gas-sensing performance. The presented method could be applied to synthesize other metal oxide homogenous thin films and to fabricate gas-sensing devices with high performances.