Sensitivity enhanced temperature sensor: one-port 2D surface phononic crystal resonator based on AlN/sapphire
Sensitivity enhanced temperature sensor: one-port 2D surface phononic crystal resonator based on AlN/sapphire
复制标题
灵敏度增强型温度传感器：基于 AlN/蓝宝石的单端口 2D 表面声子晶体谐振器
DOI：
10.1088/1361-6641/ab0a82
复制
发表时间：
2019-05-01
影响因子：
1.9
通讯作者：
Xu, Ke
中科院分区：
文献类型：
--
作者：
Dong, Wenxiu;Ji, Xue;Xu, Ke
根据单端口声表面波(SAW)谐振器的结构，设计了一种单端口表面声子晶体(SPC)谐振器。在AlN/Sapphire衬底上制作了单端口SAW谐振器和单端口SPC谐振器。对频率响应和品质因数进行了研究。单端口声表面波谐振器的基波模式为693.07兆赫。与单端口SAW谐振器不同，单端口程控谐振器在680.28兆赫和698.91兆赫有两种不同的谐振模式。从有限元模拟结果来看，这两个谐振模可能来自单端口程控振荡器的两个腔。研究了这两种谐振器的频率-温度特性。结果表明，随着温度的升高，两种谐振器的谐振模式频率均呈线性下降。利用单端口程控振荡器的这两个谐振模式之间的频差，提出了一种新型的温度传感器。该温度传感器的最终温度频率系数(TCF值)为−99.30ppm°C−1，是单端口SAW谐振器的两倍。结果表明，利用基于AlN/蓝宝石的单端口程控振荡器的双模特性，提高了温度灵敏度。
According to the structure of a one-port surface acoustic wave (SAW) resonator, a one-port surface phononic crystal (SPC) resonator is designed. Both one-port SAW resonator and one-port SPC resonator are fabricated on AlN/Sapphire. Frequency responses and quality factors are studied. The one-port SAW resonator has a fundamental resonance mode at 693.07 MHz. Unlike the one-port SAW resonator, the one-port SPC resonator has two distinct resonance modes at 680.28 MHz and 698.91 MHz, respectively. From the simulation results by finite element method (FEM), these two resonance modes may come from the two cavities of the one-port SPC resonator. Frequency-versus-temperature behaviors of these two resonators are investigated. The results show that the frequencies of resonance modes of these two resonators are decreased linearly with the increased temperature. A new kind of temperature sensor is proposed by using frequency difference between these two resonance modes of the one-port SPC resonator. The eventual temperature coefficient of frequency (TCF) value of the temperature sensor is − 99.30 ppm °C−1 which is twice more than that of the one-port SAW resonator. All results prove that temperature sensitivity is enhanced by using two mode characters of one-port SPC resonator based on AlN/Sapphire.