Characterisation of Sol-gel Thin Films by Spectroscopic Ellipsometry
Characterisation of Sol-gel Thin Films by Spectroscopic Ellipsometry
复制标题
用光谱椭圆光度法表征溶胶-凝胶薄膜
DOI：
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发表时间：
2006
期刊：
影响因子：
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通讯作者：
X. Zhang
中科院分区：
文献类型：
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作者：
H. Xie;J. Wei;X. Zhang
采用椭圆偏振光谱法研究了由正硅酸乙酯和甲基三乙氧基硅烷制备的硅酸盐基溶胶-凝胶薄膜的折射率和孔隙率。在椭圆偏振数据分析中，假设薄膜为含有孔隙的基体材料的混合物，采用线性计算和有效介质近似（EMA）模型对椭圆偏振数据进行分析。将薄膜的反射强度引入到数据分析中，有效地减少了EMA模型分析的模糊性。结果表明，采用EMA模型结合柯西方程进行数据分析，可以显著提高薄膜孔隙率和折射率的测定精度。这种方法大大提高了椭圆偏振法在多孔薄膜分析中的适用性。
The refractive index and porosity of silicate based sol-gel thin films prepared from tetraethoxysilane and methyltriethoxysilane were characterised using spectroscopic ellipsometry. With the hypothesis of considering the thin films as one mixture of matrix materials with pores for ellipsometric data analysis, linear calculation and effective medium approximation (EMA) models were employed in ellipsometric data analysis. The analysis ambiguity with EMA model was effectively reduced by incorporating the intensity of reflectance of thin films in the data analysis. Results show that data analysis using EMA model with Cauchy equation can significantly improve the accuracy in the determination of the film porosity and refractive index. This approach greatly enhances the applicability of ellipsometry in analysis of porous thin films.