Proton Transfer to Melamine Crosslinkers in X-Ray Chemically Amplified Negative Resists Studied by Time-Resolved and Steady-State Optical Absorption Measurement
Proton Transfer to Melamine Crosslinkers in X-Ray Chemically Amplified Negative Resists Studied by Time-Resolved and Steady-State Optical Absorption Measurement
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通过时间分辨和稳态光学吸收测量研究 X 射线化学放大负抗蚀剂中质子转移到三聚氰胺交联剂
DOI：
10.1143/jjap.35.6491
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发表时间：
1996
影响因子：
1.5
通讯作者：
Seiichi Tagawa Seiichi Tagawa
中科院分区：
文献类型：
--
作者：
S. Nagahara;Y. Yamashita;T. Taguchi;T. Kozawa;Yoichi Yoshida Yoichi Yoshida;Seiichi Tagawa Seiichi Tagawa
质子转移到三聚氰胺交联剂已被分析在三个X射线化学放大（CA）负抗蚀剂。一种是由间甲酚酚醛清漆、2，4，6-三（三氯甲基）-1，3，5-三嗪（TCT）和六甲氧基甲基三聚氰胺（HMMM）组成的内部制造的抗蚀剂。另外两种是市售抗蚀剂：SAL-601（Shipley Co.）和AZ-PN 100（Hoechst Co.）。利用传统的稳态光吸收光谱和纳秒时间分辨吸收光谱（脉冲辐解）分析了X射线照射引起的质子行为。结果表明，质子从基质聚合物的质子加合物（酸前体）转移到三聚氰胺交联剂在一个非常早期的步骤。这种质子转移比从基质聚合物的质子加合物到CA正性抗蚀剂中的溶解抑制剂的质子转移快得多。
Proton transfer to melamine crosslinkers has been analyzed in three X-ray chemically amplified (CA) negative resists. One is an in-house fabricated resist composed of m-cresol novolac, 2,4,6-tris (trichloromethyl)-1,3,5-triazine (TCT), and hexamethoxymethylmelamine (HMMM). The other two are commercially available resists: SAL-601 (Shipley Co.) and AZ-PN 100 (Hoechst Co.). The behavior of protons induced by X-ray exposure was analyzed using both conventional steady-state optical absorption spectroscopy and nanosecond time-resolved absorption spectroscopy (pulse radiolysis). The results indicate that the protons are transferred from the proton adducts (acid precursors) of matrix polymers to the melamine crosslinker in a very early step. This proton transfer was much faster than that from the proton adducts of matrix polymers to dissolution inhibitors in CA positive resists.