Enhancement of Blue Emission from Mg-Doped GaN Using Remote Plasma Containing Atomic Hydrogen
Enhancement of Blue Emission from Mg-Doped GaN Using Remote Plasma Containing Atomic Hydrogen
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DOI：
10.1143/jjap.44.l926
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发表时间：
2005-07
影响因子：
1.5
通讯作者：
Y. Kamiura;Masahiro Kaneshiro;Jin Tamura;T. Ishiyama;Y. Yamashita;Tomotsugu Mitani;T. Mukai
中科院分区：
文献类型：
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作者：
Y. Kamiura;Masahiro Kaneshiro;Jin Tamura;T. Ishiyama;Y. Yamashita;Tomotsugu Mitani;T. Mukai
我们首次发现，在300-400℃的低温下，用含原子氢的等离子体，特别是水蒸气等离子体进行远程等离子体处理(RPT)，可以极大地增强掺镁GaN的蓝光发射，其中水蒸气RPT在400℃处理30min的增强倍数最高，为20倍。增强的蓝光发射在500°C以下保持稳定，与原始样品的蓝光发射相似，表明其来源和机制相同。我们已经确认了发射机制是施主-受主对(DAP)复合，并得出结论，RPT在EC-0.37 eV处产生了与氢相关的施主能级，参与了DAP的发射。
We have found for the first time that blue emission from Mg-doped GaN was greatly enhanced by remote plasma treatment (RPT) with plasma containing atomic hydrogen, in particular, water vapor plasma, at low temperatures of 300–400°C. The highest enhancing factor was twenty, achieved by water vapor RPT at 400°C for 30 min. The enhanced blue emission was stable up to 500°C, similarly to blue emission from as-grown samples, suggesting the same origin and mechanism. We have confirmed that the emission mechanism is donor–acceptor pair (DAP) recombination, and have concluded that RPT produces a hydrogen-related donor level at Ec-0.37 eV involved in the DAP emission.