Chemical Vapor Deposition of Large-Sized Hexagonal WSe2 Crystals on Dielectric Substrates

Chemical Vapor Deposition of Large-Sized Hexagonal WSe2 Crystals on Dielectric Substrates
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DOI:
10.1002/adma.201503446
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发表时间:
2015-11-11
期刊:
影响因子:
29.4
通讯作者:
Loh, Kian Ping
Loh, Kian Ping
中科院分区:
材料科学1区
文献类型:
--
作者:
Chen, Jianyi;Liu, Bo;Loh, Kian Ping

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采用常压化学气相沉积法,在氢气存在下,可以在介质衬底上生长出高质量的大尺寸六方晶WSe 2晶体。这些六方晶体(横向宽度>160 μ m)具有100 cm(2)V-1 s(-1)的载流子迁移率和接近1100 mA W-1的光响应度,这与剥离的薄片的光响应度相当。[图形]。
High-quality large-sized hexagoal WSe2 crystals can be grown on dielectric substrates using atmospheric chemical vapor deposition in the presence of hydrogen gas. These hexagonal crystals (lateral width >160 um) have a carrier mobility of 100 cm(2) V-1 s(-1) and a photoresponsivity of approximate to 1100 mA W-1, which is comparable to that of exfoliated flakes.[GRAPHICS].