High-precision and large-stroke XY micropositioning stage based on serially arranged compliant mechanisms with flexure hinges
High-precision and large-stroke XY micropositioning stage based on serially arranged compliant mechanisms with flexure hinges
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DOI：
10.1016/j.precisioneng.2021.02.001
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发表时间：
2021-07-05
影响因子：
3.6
通讯作者：
Theska, Rene
中科院分区：
文献类型：
--
作者：
Graeser, Philipp;Linss, Sebastian;Theska, Rene
柔性机构由于其许多有益的特征而在微定位阶段中是最先进的。然而，它们的设计通常在运动范围、运动精度和设计空间之间进行折衷，而分布柔度的机构大多被应用。在现有的高精度运动系统中，进一步使用具有普通切口形状的柔性铰链强烈地限制了行程。因此，本文提出了一种高精度的柔性XY微定位工作台与柔性铰链能够实现± 10 mm沿着两个轴的运动范围。该平台基于一种新型的平面导向机构，该机构经过优化，可实现耦合器连杆的精确直线运动，同时保持所有铰链的旋转角度低于5度。XY运动然后通过将这些机构中的两个以串联布置耦合来实现。其次，通过使用优化的幂函数切口形状将刚体模型的所有转动关节替换为柔性铰链，实现了整体式XY工作台的合成。重点也放在实施例设计的阶段和致动器集成，以尽量减少可能的误差源。最后，准静态行为的顺应性阶段的特点是通过模拟与三维有限元模型和原型的实验研究。根据结果，开发的柔性XY微定位平台在20 mm x 20 mm的工作范围内实现了两个轴上小于10 gm的最大定位偏差和小于100格拉德的偏转误差，并且具有相对紧凑的柔性机构设计224 mm x 254 mm。
Compliant mechanisms are state of the art in micropositioning stages due to their many beneficial features. However, their design usually compromises between motion range, motion accuracy and design space, while mechanisms with distributed compliance are mostly applied. The further use of flexure hinges with common notch shapes strongly limits the stroke in existing high-precision motion systems. Therefore, this paper presents a high-precision compliant XY micropositioning stage with flexure hinges capable of realizing a motion range of +/- 10 mm along both axes. The stage is based on a novel plane-guidance mechanism, which is optimized to realize a precise rectilinear motion of the coupler link while keeping the rotation angles of all hinges below 5 degrees. The XY motion is then achieved by coupling two of these mechanisms in a serial arrangement. Next, the synthesis of the monolithic XY stage is realized by replacing all revolute joints of the rigid-body model with flexure hinges using optimized power function notch shapes. Emphasis is also placed on the embodiment design of the stage and the actuator integration to minimize possible error sources. Finally, the quasi-static behavior of the compliant stage is characterized by a simulation with a 3D FEM model and by an experimental investigation of a prototype. According to the results, the developed compliant XY micropositioning stage achieves a maximum positioning deviation of less than 10 gm in both axes and a yaw error of less than 100 grad over a working range of 20 mm x 20 mm with a comparably compact design of the compliant mechanism of 224 mm x 254 mm.