Combination of H/sup /spl infin// and PI control for an electromagnetically levitated vibration isolation system

Combination of H/sup /spl infin// and PI control for an electromagnetically levitated vibration isolation system
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DOI:
10.1109/cdc.1996.572661
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发表时间:
1996-12
期刊:
Proceedings of 35th IEEE Conference on Decision and Control
影响因子:
--
通讯作者:
K. Watanabe;S. Hara;Y. Kanemitsu;T. Haga;K. Yano;T. Mizuno;R. Katamura
K. Watanabe;S. Hara;Y. Kanemitsu;T. Haga;K. Yano;T. Mizuno;R. Katamura
中科院分区:
其他
文献类型:
--
作者:
K. Watanabe;S. Hara;Y. Kanemitsu;T. Haga;K. Yano;T. Mizuno;R. Katamura

文献摘要

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设计了一种电磁悬浮隔振系统的控制系统,采用H/sup /spl infin//和PI控制相结合的方式进行垂直方向控制。通过实验验证了该系统的非接触悬浮和微振动控制性能。该系统的主要组成部分是带有检测微振动的内置加速度传感器的隔振台、带有内置电磁铁和位移传感器的电磁执行器以及带有DSP的数字控制器。设计了一种H/sup /spl / in//控制器,用于包含pi型相对位移反馈控制器的增强系统。该H/sup /spl //控制器实现了有效的非接触式稳定悬浮和隔振。实验结果表明,所设计的控制器在垂直方向上的振动传递率可达90%。
A control system, featuring a combination of H/sup /spl infin// and PI control methods for control in the vertical direction, of an electromagnetically levitated vibration isolation system was designed. Experiments were carried out to verify this system's noncontact levitation and microvibration control performance. The main components of this system are a vibration isolation table with built-in acceleration sensors for detecting microvibration, electromagnetic actuators with built-in electromagnets and displacement sensors, and a digital controller with the DSP. An H/sup /spl infin// controller was designed to be used for an augmented system which included a PI-type controller of relative displacement feedback. This H/sup /spl infin// controller enabled effective, noncontact stable levitation as well as vibration isolation. Experimental results by a test apparatus revealed that the designed controller yielded a 90% in vibration transmissibility in vertical-direction.